Advanced Microsystems for Automotive Applications Yearbook by R. H. Grace (auth.), Sven Krueger, Wolfgang Gessner (eds.)

By R. H. Grace (auth.), Sven Krueger, Wolfgang Gessner (eds.)

Microsystems are an incredible good fortune think about the car undefined. with the intention to fulfil the purchasers requests for defense comfort and car economic system, and to meet environmental specifications, microsystems have gotten imperative. hence numerous microsystem functions got here into the dialogue. With the overseas convention AMAA 2002, VDI/VDE-IT presents a platform for the dialogue of all MST correct elements for car functions. The convention complaints assemble the papers by means of authors from vehicle providers and manufacturers.

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Principle Schematic of Surface Micromachined Structures Conclusion The choice of 3D-micromachining technology depends strongly on the application field and design of the MEMS product to be manufactured. Cost considerations usually strongly favour the cheap KOH wet etching process allowing batch processing of large quantities of wafers. Nevertheless, surface micromachined pressure sensors or gyroscopes as well as a number of acceleration sensors have achieved good commercial success. The decision on which fabrication technology to use however still has to be made individually for each application and design case.

Nce Battery Fig. 5. Linear Oxygen Sensor: Basic Construction and Closed Loop Analog Signal Processing In the close vicinity around Lambda = 1 the Nernst Cell transfer function is linear. If the oxygen concentration in the cavity is maintained at Lambda = 1, the Nernst Cell will report minute deviations. Comparing its output voltage with a reference gives the necessary error signal to establish a pump current control loop. The pump current used to transport oxygen ions into and out of the measurement cavity correlates to the amount of oxygen flowing through the diffusion barrier.

G. Lugert temperature compensation. Ideally, the correction of the temperature effects on offset and sensitivity should be accomplished independently of each other, but in practice this is very difficult to achieve and depends strongly on the electric circuit design. Here the offset temperature coefficient is corrected by trimming the resistors R1 and R2 , while temperature influences to the pressure sensitivity of the sensor are compensated by the temperature independent resistor R3 . The necessary values of the resistors are calculated for each individual sensor according to the calibration data at different temperatures and pressures.

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